7th December 2017

Partners – The University of Bedfordshire

The University of Bedfordshire LogoThe University of Bedfordshire
Location: Luton, Bedfordshire, UK
Link: https://www.beds.ac.uk/

Centre profile:

The University of Bedfordshire, situated in Luton, is one of the post-1990 universities in the UK. Research proposed in this project will be carried out in the Department of Computer Science and Technology (CST). CST has led and participated in 10 EU projects in recent years and has more than 90 research students and 20 postdoctoral research fellows. Laser interference nanomanufacturing is one of the key areas in CST’s research strategic plan.

Joint Research Centre for Computer-Controlled Nano-manufacturing (JR3CN)

The centre has had key involvement in the EU projects: “Development of Lithography Technology for Nanoscale Structuring of Materials Using Laser Beam Interference (DELILA)”, EU FP6, 2006-2009, “Hybrid Ultra Precision Manufacturing Process Based on Positional-and Self-assembly for

Complex Micro-products (HYDROMEL)”, EU FP6, 2006-2010 and “Laser Nanoscale Manufacturing (LaserNaMi)”, EU FP7, 2010-2013. It has published more than  100 research papers in high quality journals, reporting its achievements on the effect of azimuthal angles on laser interference lithography, the fabrication of moth-eye structures on silicon by direct laser interference lithography, the creation of anti-reflecting and super-hydrophobic surfaces and the effects of polarization on four-beam laser interference lithography.

The Centre has a 600m2 clean room and extensive facilities for laser interference lithography and nanoscale characterization; including high power laser interference lithography systems, coherent beam diagnostics, multi-function SPM systems, a dedicated nano-manipulation & lithography SPM, an environmental scanning electron microscope (SEM), FIB, ICP and a 3D confocal microscope.

Project Roles:

  • Design and prototyping of laser interference lithography optical systems for in-situ application.
  • Study of surface interactions with pulsed laser interference patterns.
  • Contributes to project management through leadership of WP1 and through dissemination and exploitation tasks


Prof. Dayou Li is Professor of Robotics and Deputy Director of JR3CN. His current research is dedicated to the precise control of AFM for use in nano-assembly and on the application of laser interference processes on the nanoscale. He has led two 2 EU projects (SRS and ECROBOT) to recent successful completion and is leading a further EU project (BioRA) within this theme. He is the local PI of NanoStencil project. Prof. Li has about 100 research papers in hi research areas.



Prof. Zuobin Wang is a Professor within JR3CN, Vice-President of the 3M-NANO international Society and the founding chair of the IEEE International Conference on 3M-NANO. As coordinator or participant, he has been involved in more than 10 recent EU projects, such as DELILA, HYDROMEL, LaserNaMi and FabSurfWAR in the areas of laser interference, laser nanoscale manufacturing and nanometrology. The results of these projects and more recent studies on the nanostructuring of silicon surfaces underpin the lithography aspects of this proposal.



Prof. Changsi Peng is leading a research group working on direct laser interference nano patterning, absorption of pulsed laser including thermal gradients and transition, photochemical reactions on surface, and defect-free site-controlled epitaxial InAs/GaAs quantum dots (QDs). He has intensive experience in the Molecular Beam epitaxy and processing of III-V semiconductor photonic devices. Prof. Peng has published more than 140 scientific research papers and has a number of patents in these areas.